Jose Angel Segovia
at Univ de Sevilla
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Oxides, Switches, Sensors, Etching, Metals, Capacitance, Finite element methods, Field effect transistors, Semiconducting wafers

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