Dr. Joseph A. Abate
Sr Technical & Project Manager
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 18 September 1995
Proc. SPIE. 2523, Applications of Laser Plasma Radiation II
KEYWORDS: X-rays, Plasmas, Laser irradiation, Xenon, Gas lasers, Neodymium glass lasers, X-ray imaging, X-ray detectors, X-ray lithography, Pulsed laser operation

Proceedings Article | 19 May 1995
Proc. SPIE. 2437, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V
KEYWORDS: Lithography, X-rays, X-ray sources, Printing, Image quality, Photomasks, Photoresist processing, Semiconducting wafers, X-ray lithography, Chemically amplified resists

Proceedings Article | 1 April 1990
Proc. SPIE. 1223, Solid State Lasers
KEYWORDS: Mirrors, Optical amplifiers, Oscillators, Spatial filters, Reliability, Laser development, Lamps, Solid state lasers, X-ray lithography, Laser systems engineering

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