Dr. Joseph S. Gordon
Senior Member/Technical Staff at Toppan Photomasks Inc
SPIE Involvement:
Publications (9)

Proceedings Article | 27 May 2009 Paper
Joseph Gordon, Marianna Silova, Brid Connolly, Jeroen Huijbregtse, Nicolae Maxim, Larry Frisa, Christian Chovino, Colleen Weins
Proceedings Volume 7470, 74700C (2009) https://doi.org/10.1117/12.835174
KEYWORDS: Air contamination, Reticles, Photomasks, Pellicles, Humidity, Lithography, Contamination, Manufacturing, Contamination control, Optical lithography

Proceedings Article | 30 October 2007 Paper
Joseph Gordon, Larry Frisa, Christian Chovino, David Chan, John Keagy, Colleen Weins
Proceedings Volume 6730, 67301E (2007) https://doi.org/10.1117/12.747145
KEYWORDS: Air contamination, Reticles, Photomasks, Humidity, Contamination, Inspection, Atmospheric particles, Semiconducting wafers, Data modeling, Semiconductors

SPIE Journal Paper | 1 July 2007
JM3, Vol. 6, Issue 03, 031003, (July 2007) https://doi.org/10.1117/12.10.1117/1.2783418
KEYWORDS: Apodization, Optical proximity correction, Pellicles, Data modeling, Lithography, Signal attenuation, Critical dimension metrology, Gaussian filters, Calibration, Optical filters

Proceedings Article | 11 May 2007 Paper
Joseph Gordon, David Chan, Larry Frisa, Colleen Weins, Christian Chovino, John Keagy, Steve Mahoney, Frank Chen, Makoto Kozuma, Kyoko Kuroki, Takahiro Matsuura
Proceedings Volume 6607, 660707 (2007) https://doi.org/10.1117/12.728920
KEYWORDS: Air contamination, Photomasks, Reticles, Pellicles, Atmospheric particles, Sulfur, Gases, Nitrogen, Semiconducting wafers, Semiconductors

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 63490K (2006) https://doi.org/10.1117/12.686741
KEYWORDS: Pellicles, Optical proximity correction, Apodization, Polarization, Critical dimension metrology, Lithography, Photomasks, Semiconducting wafers, Reticles, Spatial frequencies

Showing 5 of 9 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top