A method of generating arbitrary structures using spatial light modulator (SLM) based holograms with multiphoton
absorption is presented. Current methodologies for designing 3D prototyping, such as G-code, are not ideally suited for holographic lithography and therefore limit its functionality or requires additional complex processing. The process
outlined here allows a microstructure to be fabricated based on designs from commercially available CAD software.
CAD software enables the microstructures to be designed and then realized using dynamic holographic lithography
methods enabling designers a simple, quick, and robust method of fabricating novel microstructures. Holographic
patterning routines such as raster scans of one or multiple focal points, holograms encoded with two or three dimensional spatial information, or a combination of both techniques may be utilized with this methodology. The process described allows for the development of complex structures that would be difficult to otherwise program using traditional methods. No limitations are placed on the form or function of the designed components, enabling undercut and interlocking features to be fabricated. This methodology also enables the location and orientation of the structures to be controlled dynamically simplifying the process of creating multi-scaled structures or complex arrays of arbitrary structures. As a proof of concept demonstration, a simple cantilever beam was modeled and fabricated.
A holographic multiphoton fabrication technique is applied to the development of a microcantilever based analyte
sensor. Holograms generated using a spatial light modulator (SLM) initiate the fabrication of sub-micron three-dimensional structures. Chemically functional microstructures are patterned onto the surface of commercially
available piezoelectric microcantilevers using this holographic lithography technique. Controlling the form and
location of the added structure enables the resonant frequency of the cantilever to be regulated with a higher
accuracy than is currently available using bulk lithography techniques and without the inclusion of additional
electronic feedback control components. A potential analyte sensor is then developed by patterning on an array of
multiple piezoelectric microcantilevers, which are initially identical within manufacturing tolerances. The resonant
frequency, was adjusted such that cantilevers, which were initially separated by 2.82 kHz, are tuned to be within
0.13 kHz of each other. Connecting the piezoelectric microcantilevers in series enables the response of each sensor
element to be measured simultaneously using a single frequency based data acquisition system and allowing rapid