Dr. Joseph Pankert
Vice President at Philips Lighting BV
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 29 January 2008
Proc. SPIE. 6908, Vertical-Cavity Surface-Emitting Lasers XII
KEYWORDS: Modulation, Doppler effect, Sensors, Light scattering, Laser applications, Laser scattering, Speckle pattern, Vertical cavity surface emitting lasers, Laser optics, Signal detection

Proceedings Article | 3 May 2007
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Lithography, Mirrors, Electrodes, Scanners, Xenon, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Electrodes, Scanners, Interfaces, Lamps, Reflectivity, Control systems, Extreme ultraviolet, Extreme ultraviolet lithography, Control systems design, Tin

Proceedings Article | 16 June 2005
Proc. SPIE. 5835, 21st European Mask and Lithography Conference
KEYWORDS: Lithography, Metrology, Reflectivity, Magnetism, Xenon, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Chemical species, Electrodes, Lamps, Reflectivity, Control systems, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Tin

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top