Joseph A. Straub
Global Process Owner/Inspection at Toppan Photomasks Inc
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | October 25, 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Light sources, Reticles, Contamination, Optical spheres, Defect detection, Quartz, Manufacturing, Inspection, Photomasks, Computer aided design

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Metals, Manufacturing, Inspection, Design for manufacturing, Photomasks, Semiconducting wafers, Lawrencium, Chemical mechanical planarization, Design for manufacturability

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Reticles, Visualization, Manufacturing, Inspection, Design for manufacturing, Photomasks, Optical proximity correction, Electronic design automation, Defect inspection

PROCEEDINGS ARTICLE | November 4, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Manufacturing, Inspection, Software development, Photomasks, Computed tomography, Optical proximity correction, Yield improvement, Electronic design automation

PROCEEDINGS ARTICLE | April 23, 1999
Proc. SPIE. 3665, 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
KEYWORDS: Reticles, Defect detection, Detection and tracking algorithms, Visualization, Inspection, Scanning electron microscopy, Photomasks, Optical proximity correction, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | December 18, 1998
Proc. SPIE. 3546, 18th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Reticles, Defect detection, Manufacturing, Inspection, Scanning electron microscopy, Inspection equipment, Photomasks, Optical proximity correction, Semiconducting wafers, Defect inspection

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top