Mr. Joseph J. Synoradzki
at Advanced Micro Devices
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Lithography, Metrology, Logic, Data modeling, Spectroscopy, Reflectivity, Scatterometry, Reflectometry, Reflectance spectroscopy, Critical dimension metrology

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