Dr. Joy Y. Cheng
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Conference Program Committee | Author | Editor
Publications (20)

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Chemical species, Polymers, Molecules, Ions, Diffusion, Oxygen, Monte Carlo methods, Extreme ultraviolet, Extreme ultraviolet lithography, Systems modeling

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Etching, Dry etching, Polymers, Annealing, Coating, Scanning electron microscopy, Directed self assembly, Plasma etching, Photomicroscopy

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Etching, Polymers, Silicon, Photomasks, Directed self assembly, Line edge roughness, Tolerancing

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Etching, Image segmentation, Composites, Scanning electron microscopy, Photomasks, Directed self assembly, Picosecond phenomena, System on a chip

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, 3D modeling, Monte Carlo methods, Photomasks, Directed self assembly, Computational lithography, Critical dimension metrology, Photoresist processing, Instrument modeling

Showing 5 of 20 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 4 May 2017

SPIE Conference Volume | 5 July 2016

Conference Committee Involvement (10)
Advances in Patterning Materials and Processes XXXVIII
21 February 2021 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Showing 5 of 10 Conference Committees
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