Joy Tan
at RMIT Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Thin films, Sputter deposition, Metals, X-ray diffraction, Scanning electron microscopy, Bismuth, Thermoelectric materials, Thin film deposition, Tellurium, Temperature metrology

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