Mrs. Joyce A. Lowes
at Brewer Science Inc
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | April 16, 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Polymers, Silicon, Reflectivity, Photoresist materials, Photomasks, Picosecond phenomena, Critical dimension metrology, Semiconducting wafers, Photoresist developing

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Lithographic illumination, Polymers, Scanners, Silicon, Diffusion, Photography, Scanning electron microscopy, Photoresist materials, Photoresist developing

PROCEEDINGS ARTICLE | March 26, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Polymers, Diffusion, Chemistry, Photoresist materials, Picosecond phenomena, Semiconducting wafers, Photoresist developing, Standards development, Quenching (fluorescence)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Antireflective coatings, Interferometers, Polymers, Electroluminescence, Scanning electron microscopy, Photoresist materials, Photoresist developing, Polymer thin films, Bandpass filters

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Etching, Polymers, Molecules, Coating, Electroluminescence, Photoresist materials, Photoresist developing, Polymer thin films, Bottom antireflective coatings

PROCEEDINGS ARTICLE | April 15, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Diffractive optical elements, Optical properties, Polymers, Reflectivity, Electroluminescence, Scanning electron microscopy, Photoresist materials, Photoresist developing, Polymer thin films

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top