Joyce Tan Pei Ying
at Institute of Materials Research and Engineering
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Skin, Copper, Silicon, Scanning electron microscopy, Chemical analysis, Microfabrication, Electroplating

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