Dr. Juan C. Ivaldi
VP R&D at Nikon Research Corp of America
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Reticles, Optical lithography, Scanners, Scanning electron microscopy, Photomasks, Critical dimension metrology, Semiconducting wafers, Binary data, Phase shifts

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