Dr. Juan Ramos-Martos Profile

Dr. Juan Ramos-Martos

at Ctr Nacional de Microelectrónica

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Publications (1)

Proceedings Article | 1 July 2005 Open Access

SIGEM, low-temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits

Antonio Ragel-Morales, Kersten Kehr, Christina Leinenbach, Alberto Arias-Drake, Joaquin Ceballos-Caceres, Anshu Mehta, Miguel Angel Lagos-Florido, Jose Miguel Mora-Gutierrez, Agnes Verbist, Bert du Bois, Juan Ramos-Martos, Ann Witvrouw, Steven Van Aerde, Jose Maria Munoz-Hinojosa, Jorg Spengler

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608499

KEYWORDS: Amplifiers, Signal to noise ratio, Sensors, Signal detection, Modulators, Microelectromechanical systems, Digital signal processing, Electrodes, Resonators, Semiconducting wafers

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