A kind of novel optic strip waveguide phase modulator driven by a surface acoustic wave (SAW), applied to the signal modulation of photo-electronic-integrated accelerator based on Mach-Zehnder interferometry, present in this paper. The characteristic parameters of the acoustooptic modulator are investigated theoretically and experimentally. Measurements were performed on ZnO thin film deposited on Si substrate with f0=48MHz at λ0 = 1.3μm optical wavelength using K9 glass waveguide. The main parameters of the modulator is as following: the ZnO thin film with the dimensions of 5 mm x 0.8 mm x 0.003 mm; Interdigital transducer with the fingers of 17 pairs, the electrode aperture width of 4.46 mm and the interdigital period of 27.19 μm.
A novel Si-based MOEMS acceleration seismic geophone, based on M-Z interferometry, is present in this paper. In one silicon chip, several elements including four silicon beams,seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system is as following: resonance frequency: 1353 Hz; phase detection sensitivity ΔΦ/a: 1.2×10-4rad/m/s2.