Judith A. Huckabay
Architect and Sales Representative at Cadence Design Systems Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (8)

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Scanners, Manufacturing, Photomasks, Double patterning technology, Optical proximity correction, Electronic design automation

Proceedings Article | 16 November 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Logic, Optical lithography, Deep ultraviolet, Design for manufacturing, Photomasks, Double patterning technology, Algorithm development, Performance modeling, Model-based design, Rule based systems

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Inspection, Printing, Design for manufacturing, Photomasks, Beam shaping, Double patterning technology, Optical proximity correction, Electronic design automation, Vestigial sideband modulation

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Metals, Error analysis, Resistance, Capacitance, Photomasks, Double patterning technology, Overlay metrology, Device simulation, Resolution enhancement technologies

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Logic, Optical lithography, Scanners, Photomasks, Double patterning technology, Optical proximity correction, Neodymium, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Lithography, Manufacturing, 3D modeling, Feature extraction, Printing, Photomasks, Double patterning technology, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Showing 5 of 8 publications
Conference Committee Involvement (1)
Photomask Technology
7 October 2008 | Monterey, California, United States
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