Dr. Judon Stoeldraijer
at ASML Netherlands BV
SPIE Involvement:
Publications (28)

Proceedings Article | 5 October 2023 Paper
Daniel Golde, Björn Butscher, Paul Gräupner, Peter Kürz, Dirk Jürgens, Olaf Conradi, Jan van Schoot, Judon Stoeldraijer
Proceedings Volume 12802, 1280202 (2023) https://doi.org/10.1117/12.2673952
KEYWORDS: Mirrors, Extreme ultraviolet, Design and modelling, Semiconducting wafers, Extreme ultraviolet lithography, EUV optics, Scanners, Reticles, Optics manufacturing, Manufacturing

Proceedings Article | 30 April 2023 Presentation
Paul Graeupner, Daniel Golde, Jan van Schoot, Peter Kuerz, Judon Stoeldraijer
Proceedings Volume PC12494, PC1249405 (2023) https://doi.org/10.1117/12.2658370
KEYWORDS: EUV optics, Lithography, Extreme ultraviolet lithography, Mirrors, Surface finishing, Solids, Scanners, Polishing, Metrology, Extreme ultraviolet

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12051, 1205102 (2022) https://doi.org/10.1117/12.2614778
KEYWORDS: Mirrors, EUV optics, Projection systems, Extreme ultraviolet, Photomasks, Optics manufacturing, Metrology, Lithography, Wavefronts

Proceedings Article | 28 September 2021 Presentation
Proceedings Volume 11854, 118540F (2021) https://doi.org/10.1117/12.2600962
KEYWORDS: EUV optics, Lithography, Optics manufacturing, Scanners, Mirrors, Wafer-level optics, Extreme ultraviolet lithography, Surface finishing, Silicon, Semiconductors

Proceedings Article | 27 September 2021 Presentation
Proceedings Volume 11854, 1185403 (2021) https://doi.org/10.1117/12.2600951
KEYWORDS: Extreme ultraviolet lithography, Sensors, Scanners, Projection systems, Printing, Optical lithography, Mirrors, Lens design, High volume manufacturing, Device simulation

Showing 5 of 28 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top