Dr. Juha T. Rantala
SPIE Involvement:
Publications (26)

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Electron beam lithography, Optical lithography, Polymers, Silicon, Coating, Scanning electron microscopy, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness

Proceedings Article | 11 October 2018 Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Electron beam lithography, Etching, Metals, Silicon, Coating, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, System on a chip

Proceedings Article | 25 April 2008 Paper
Proc. SPIE. 7001, Photonics in Multimedia II
KEYWORDS: Refractive index, FT-IR spectroscopy, Waveguides, Etching, Polymers, Dielectrics, Image sensors, Microlens, Thin film coatings, Semiconducting wafers

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5355, Integrated Optics: Devices, Materials, and Technologies VIII
KEYWORDS: Fabrication, Thin films, Electron beam lithography, Refractive index, Ferroelectric materials, Metals, Crystals, Sol-gels, Electro optics, Zirconium

SPIE Journal Paper | 1 December 2002
OE Vol. 41 Issue 12
KEYWORDS: Axicons, Ultraviolet radiation, Optical components, Diffraction, Chemical elements, Diffraction gratings, Sol-gels, Collimation, Optical testing, Binary data

Showing 5 of 26 publications
Proceedings Volume Editor (3)

Conference Committee Involvement (8)
Silicon Photonics and Photonic Integrated Circuits
12 April 2010 | Brussels, Belgium
Silicon Photonics and Photonic Integrated Circuits
7 April 2008 | Strasbourg, France
Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits
3 April 2006 | Strasbourg, France
Integrated Optics and Photonic Integrated Circuits
27 April 2004 | Strasbourg, France
Emerging Optoelectronic Applications
26 January 2004 | San Jose, CA, United States
Showing 5 of 8 Conference Committees
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