Juikun Lee
at Cabot Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Polymers, Metals, Copper, Dielectrics, Micromachining, Microfabrication, Semiconducting wafers, Surface finishing, Chemical mechanical planarization

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Polishing, Etching, Silicon, Microopto electromechanical systems, Photomasks, Semiconducting wafers, Surface finishing, Standards development, Chemical mechanical planarization

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