Dr. Julia A. Sakamoto
Senior Computer Scientist at
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | March 30, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Scanners, Optical proximity correction, Photomasks, Lithography, Metals, Error analysis, Overlay metrology, Semiconducting wafers, Statistical analysis, Optical lithography

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Optical design, Optical lithography, Statistical analysis, Etching, Image processing, Scanners, Ions, Monte Carlo methods, Computational lithography, Optical proximity correction, Optical alignment, Semiconducting wafers, Integrated circuit design, Performance modeling, 193nm lithography

PROCEEDINGS ARTICLE | October 2, 2015
Proc. SPIE. 9630, Optical Systems Design 2015: Computational Optics
KEYWORDS: Lithography, Graphics processing units, Ions, Fourier transforms, Data processing, Photomasks, Transistors, Integrated circuits, Algorithm development, Semiconducting wafers

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