Focal plane array (FPA) technology is mature and is widely used for imaging applications. However, FPAs have
broadband responses which limit their ability to provide high performance in hyperspectral applications such as
detection of buried explosives, and identifying the presence of explosive chemicals and their concentrations. EPIR is
currently developing Micro-Opto-Electro-Mechanical System (MOEMS) Fabry-Perot interferometer filter (FPF) devices
for FPAs. In this paper, we present our approach to MOEMS FPF design and fabrication that will meet the size
requirements for large format FPA hyperspectral imaging. We also report the performance of our FPF resonance cavity,
capable of up to 3 μm change gap in tens of nanometer increments.