Juliann Opitz
Senior Process Engineer at Siemens EDA
SPIE Involvement:
Publications (23)

Proceedings Article | 26 May 2022 Presentation + Paper
Lianghong Yin, Shumay Shang, Fan Jiang, Le Hong, Robin Chia, Juli Opitz, Paul Adam, Ian Stobert, Yee-Wee Koh
Proceedings Volume 12052, 120520A (2022) https://doi.org/10.1117/12.2613933
KEYWORDS: Tolerancing, Silicon photonics, Optical proximity correction, Machine learning, Silicon, Vector spaces, Photomasks, Electronic design automation, Data modeling, Waveguides

Proceedings Article | 15 March 2012 Paper
Juliann Opitz, Andres Torres, Ioana Graur, Wael Manhawy, Suniti Kanodia, Marwah Shafee, Sarah Mohamed, Ahmed Hassand, Jeanne Bickford
Proceedings Volume 8327, 832711 (2012) https://doi.org/10.1117/12.916431
KEYWORDS: Manufacturing, Photomasks, Optical lithography, Design for manufacturing, Double patterning technology, Lithography, Design for manufacturability, Visualization, Resolution enhancement technologies, Interfaces

Proceedings Article | 26 June 2003 Paper
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485494
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Reticles, Lithography, Chromium, Metrology, Optical lithography, Diffraction, Semiconductors

Proceedings Article | 16 July 2002 Paper
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473411
KEYWORDS: Optical alignment, Data transmission, Semiconducting wafers, Chemical mechanical planarization, Overlay metrology, Polishing, Diffraction, Scanning probe microscopy, Manufacturing, Thin films

Proceedings Article | 23 June 2000 Paper
Hiroshi Ito, Robert Allen, Juliann Opitz, Thomas Wallow, Hoa Truong, Donald Hofer, Pushkara Varanasi, George Jordhamo, Saikumar Jayaraman, Richard Vicari
Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388254
KEYWORDS: Polymers, Polymerization, Carbon, Lithography, Crystals, Semiconducting wafers, Quartz, Absorption, Silicon, Carbonates

Showing 5 of 23 publications
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