Dr. Julien Frougier
at IBM Thomas J. Watson Research Ctr.
SPIE Involvement:
Publications (7)

Proceedings Article | 10 April 2024 Presentation + Paper
Houssam Chouaib, Valeria Dimastrodonato, Anderson Chou, Agostino Cangianoa, Andrew Cross, Derrick Shaughnessy, Zhengquan Tan, Daniel Schmidt, Curtis Durfee, Shanti Pancharatnam, Julien Frougier, Andrew Greene, Mary Breton
Proceedings Volume 12955, 129550L (2024) https://doi.org/10.1117/12.3010790
KEYWORDS: Semiconducting wafers, Education and training, Transmission electron microscopy, Nanosheets, Gallium arsenide, Data modeling, Ellipsometry, Metrology, Diffractive optical elements, Mathematical optimization

SPIE Journal Paper | 21 February 2023 Open Access
JM3, Vol. 22, Issue 03, 031203, (February 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031203
KEYWORDS: Metrology, Interferometry, Data modeling, Tunable filters, Semiconducting wafers, Scatterometry, Optical filters, Machine learning, Education and training, Dielectrics

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530S (2022) https://doi.org/10.1117/12.2614077
KEYWORDS: Metrology, Semiconducting wafers, Scatterometry, Optical filters, Dielectrics, Data modeling, Back end of line, Front end of line, Chemical mechanical planarization, Transmission electron microscopy

SPIE Journal Paper | 18 April 2022 Open Access
JM3, Vol. 21, Issue 02, 021206, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021206
KEYWORDS: Metrology, Scatterometry, Optical lithography, Machine learning, Silicon, Atomic force microscopy, Nanowires, Germanium, Line edge roughness, Scanning electron microscopy

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11611, 116111U (2021) https://doi.org/10.1117/12.2582364
KEYWORDS: Interferometry, Silicon, Metrology, Scatterometry, Reflectometry, Transmission electron microscopy, Semiconductor manufacturing, Reflectivity, Polarization control

Showing 5 of 7 publications
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