Dr. Julien Ryckaert
at imec
SPIE Involvement:
Author
Publications (38)

Proceedings Article | 22 April 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Logic, Clocks, Fin field effect transistors, Metals, Dielectrics, Control systems, Field effect transistors, Multiplexers, Standards development, Back end of line

Proceedings Article | 30 October 2020 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Reticles, Imaging systems, Image resolution, Photomasks, Extreme ultraviolet, Optical proximity correction, Semiconducting wafers

Proceedings Article | 25 March 2020 Presentation
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Logic, Optical lithography, Fin field effect transistors, Etching, Metals, Dielectrics, Extreme ultraviolet, Field effect transistors, Logic devices, Multiplexers

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Logic, Optical lithography, 3D imaging standards, Fin field effect transistors, Metals, Semiconducting wafers, System on a chip, Wafer bonding, Standards development, Back end of line

Showing 5 of 38 publications
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