Prof. Jun Ho Lee
Professor at Kongju National Univ
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Point spread functions, Microscopy, Light scattering, Inspection, Image resolution, Scanning electron microscopy, Rayleigh scattering, Optical resolution, Mie scattering, Semiconducting wafers

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Mirrors, Metrology, Sensors, Image processing, Microscopy, Optical microscopy, Inspection, Wavefront sensors, Adaptive optics, Semiconducting wafers

Proceedings Article | 5 September 2017
Proc. SPIE. 10402, Earth Observing Systems XXII
KEYWORDS: Telescopes, Mirrors, Visible radiation, Sensors, Spectroscopy, Wavefront sensors, Optical fabrication, Relays, Charge-coupled devices, Optical alignment

Proceedings Article | 24 November 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Wafer-level optics, Mirrors, Sensors, Image processing, Optical microscopy, Wavefront sensors, Adaptive optics, Wafer inspection, Optical benches, Semiconducting wafers

Proceedings Article | 31 October 2016
Proc. SPIE. 10020, Optoelectronic Imaging and Multimedia Technology IV
KEYWORDS: Actuators, Telescopes, Stars, Adaptive optics, Deformable mirrors, Computer simulations, Turbulence, Silicon carbide, Atmospheric turbulence, Device simulation

Showing 5 of 18 publications
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