Dr. Jun-ichi Kushibiki
at Tohoku Univ
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Glasses, Polishing, Surface finishing, Ultrasonics, Extreme ultraviolet lithography, Birefringence, Line scan image sensors, Optical components, Polarization, Titanium dioxide

PROCEEDINGS ARTICLE | March 23, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Glasses, Ultrasonics, Extreme ultraviolet lithography, Temperature metrology, Velocity measurements, Acoustics, Annealing, Photomasks, Mirrors, Material characterization

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Calibration, Material characterization, Silica, Temperature metrology, Extreme ultraviolet lithography, Acoustics, Titanium dioxide

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Material characterization, Direct methods, Silica, Acoustics, Extreme ultraviolet lithography, Temperature metrology, Titanium dioxide

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Extreme ultraviolet lithography, Material characterization, Control systems, Photomasks, Reflectivity, EUV optics, Calibration

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Calibration, Acoustics, Wave propagation, Signal attenuation, Material characterization, Extreme ultraviolet lithography, Chemical analysis

Showing 5 of 8 publications
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