Dr. Jun-ichi Kushibiki
at Tohoku Univ
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Optical components, Polishing, Titanium dioxide, Polarization, Birefringence, Glasses, Ultrasonics, Extreme ultraviolet lithography, Surface finishing, Line scan image sensors

PROCEEDINGS ARTICLE | March 23, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Mirrors, Glasses, Annealing, Ultrasonics, Photomasks, Extreme ultraviolet lithography, Velocity measurements, Acoustics, Material characterization, Temperature metrology

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Titanium dioxide, Silica, Calibration, Glasses, Ultrasonics, Extreme ultraviolet lithography, Velocity measurements, Acoustics, Material characterization, Temperature metrology

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Titanium dioxide, Silica, Glasses, Ultrasonics, Extreme ultraviolet lithography, Velocity measurements, Acoustics, Material characterization, Direct methods, Temperature metrology

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Calibration, Glasses, Reflectivity, Control systems, Ultrasonics, Photomasks, Extreme ultraviolet lithography, Velocity measurements, Material characterization, EUV optics

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Signal attenuation, Calibration, Glasses, Ultrasonics, Wave propagation, Chemical analysis, Extreme ultraviolet lithography, Velocity measurements, Acoustics, Material characterization

Showing 5 of 8 publications
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