The method is presented to measure the homogeneity of the refractive index of infrared optical material, germanium (Ge)
plate, using infrared interferometer working at 10.6μm. In order to measure the refractive index homogeneity of large
diameter infrared material, the infrared standard lens is used in the test arm of infrared interferometer. The Ge plate is
placed in the infrared spherical wave brought by infrared standard lens. The difference is measured between the
wavefront with Ge plate and the one without Ge plate by the infrared interferometer working at 10.6μm. The addition
aberration caused by Ge plate needs to be eliminated with Zernike polynomials fit from the results. As the Ge plate is too
soft to process, its surface form may not meet the requirement for the measurement. In order to improve the measuring
accuracy of the refractive index homogeneity, the surface deformations of two boundaries of the Ge plate are measured
by phase-shifting digital interferometer working at 0.6328μm. The surface deformations are removed from the result of
the refractive index homogeneity measurement. In this way, the measuring accuracy of the refractive index homogeneity
is up to 10-5. A piece of Ge plate is tested. The peak-valley (PV) value of its refractive index deviation is 3.65×10-5, and
the root mean square (RMS) value is 4.11×10-6.
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