Prof. Jun Peng
at Simon Fraser Univ
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | March 1, 2006
Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V
KEYWORDS: Oxides, Modulation, Glasses, Argon ion lasers, Zinc, Objectives, Photomasks, Raster graphics, Zinc oxide, Oxidation

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Transparency, Glasses, Silicon, Photoresist materials, Silicon films, Photomasks, Aluminum, Absorbance, Oxidation

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Lithography, Calibration, Glasses, Silicon, Photoresist materials, Silicon films, Photomasks, Raster graphics, Camera shutters, Photoresist developing

PROCEEDINGS ARTICLE | December 9, 2004
Proc. SPIE. 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
KEYWORDS: Oxides, Etching, Indium, Silicon, Laser processing, Photomasks, Semiconducting wafers, Anisotropic etching, Tin, Oxidation

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Transparency, Calibration, Silicon, Photoresist materials, Photomasks, Absorbance, Raster graphics, Binary data, Camera shutters, Tin

PROCEEDINGS ARTICLE | July 15, 2004
Proc. SPIE. 5339, Photon Processing in Microelectronics and Photonics III
KEYWORDS: Glasses, Indium, Argon ion lasers, Photoresist materials, Photomasks, Absorbance, Raster graphics, Binary data, Tin, Absorption

Showing 5 of 10 publications
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