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Dr. Jun Wang
at Shanghai Dianji Univ
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Publications (1)
Proceedings Article | 16 December 2013 Paper
An investigation of passivation properties of SiNx-Si interface by an MIS model
Jun Wang, Meijie Han, Xueliang Ma, Hua Zhang, Ping Chen, Haixin Zhu
Proceedings Volume 9068, 90680Z (2013) https://doi.org/10.1117/12.2053225
KEYWORDS: Interfaces, Silicon, Plasma enhanced chemical vapor deposition, Thin films, Dielectrics, Silicon films, Crystals, Doping, Electrical engineering, Silicon solar cells
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