Dr. Junbo Liu Profile

Dr. Junbo Liu

at Institute of Optics and Electronics CAS

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Author

Publications (7)

Proceedings Article | 4 April 2023 Paper

Fabrication and characteristics on gallium nitride-based ultraviolet photodetectors for i-line lithography machines

Fan Yang, Jintong Xu, Fucheng Yang, Ling Wang, Junbo Liu, Xiangyang Li

Proceedings Volume 12617, 1261760 (2023) https://doi.org/10.1117/12.2666637

KEYWORDS: Gallium nitride, Lithography, Ultraviolet radiation, Dark current, Ultraviolet detectors, Photodetectors, Signal detection, Light sources, Photocurrent

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Proceedings Article | 4 April 2023 Paper

Source optimization using hybrid genetic algorithm in lithography

Haifeng Sun, Qingyan Zhang, Chuan Jin, Haiyang Quan, Jian Wang, Song Hu, Junbo Liu

Proceedings Volume 12617, 126176M (2023) https://doi.org/10.1117/12.2666722

KEYWORDS: Lithography, Mathematical optimization, Matrices, Lithographic illumination, Genetic algorithms, Particle swarm optimization, Image processing, Source mask optimization, Coherence imaging, Technology

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Proceedings Article | 6 February 2019 Paper

Design of bifocal compound eyes and gray mask fabrication based on maskless photolithography

Jianghui Liu, Junbo Liu, Qingyuan Deng, Yan Tang, Song Hu

Proceedings Volume 10842, 108421B (2019) https://doi.org/10.1117/12.2505369

KEYWORDS: Optical lithography, Photomasks, Digital micromirror devices, Microlens, Micromirrors

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Proceedings Article | 25 October 2016 Paper

Thickness measurement of transparent film by white-light interferometry

Qinyuan Deng, Yi Zhou, Junbo Liu, Jingwei Yao, Song Hu

Proceedings Volume 9685, 968506 (2016) https://doi.org/10.1117/12.2243601

KEYWORDS: Interferometry, Reflectometry, Thin films, Reflection, Silicon films, Silicon, Optics manufacturing, Beam splitters, Reflectivity, Fourier transforms

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Proceedings Article | 25 October 2016 Paper

Topography measurement of micro structure by modulation-based method

Yi Zhou, Yan Tang, Junbo Liu, Qinyuan Deng, Yiguang Cheng, Song Hu

Proceedings Volume 9685, 968505 (2016) https://doi.org/10.1117/12.2243599

KEYWORDS: Modulation, Light sources, Interferometry, Light, Optical interferometry, Scanning tunneling microscopy, CCD cameras, Microfabrication, Confocal microscopy, Imaging systems

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Proceedings Article | 25 October 2016 Paper

UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication

Qian Deng, Junbo Liu, Shaolin Zhou, Yan Tang, Lixin Zhao, Song Hu, Yinghong Chen

Proceedings Volume 9685, 96850M (2016) https://doi.org/10.1117/12.2243456

KEYWORDS: Ultraviolet radiation, Lithography, Lithographic illumination, Photomasks, Ions, Diffraction, UV optics, Nanoimprint lithography, Second-harmonic generation, Semiconducting wafers

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Proceedings Article | 21 August 2014 Paper

Design of a projection objective with high numeric aperture and large view field

Junbo Liu, Song Hu, Hongtao Gao, Lixin Zhao, Xianchang Zhu

Proceedings Volume 9283, 92830L (2014) https://doi.org/10.1117/12.2069472

KEYWORDS: Objectives, Optics manufacturing, Monochromatic aberrations, Modulation transfer functions, Lens design, Lithography, Distortion, Diffraction, Lithographic equipment, Geometrical optics

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Showing 5 of 7 publications

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