Dr. Junbo Liu
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 6 February 2019 Paper
Proc. SPIE. 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
KEYWORDS: Optical lithography, Microlens, Micromirrors, Photomasks, Digital micromirror devices

Proceedings Article | 25 October 2016 Paper
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Lithography, Diffraction, Second-harmonic generation, Lithographic illumination, Ultraviolet radiation, Ions, Photomasks, Nanoimprint lithography, Semiconducting wafers, UV optics

Proceedings Article | 25 October 2016 Paper
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Confocal microscopy, Light sources, Modulation, Imaging systems, Interferometry, CCD cameras, Optical interferometry, Microfabrication, Scanning tunneling microscopy, Light

Proceedings Article | 25 October 2016 Paper
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Thin films, Beam splitters, Reflection, Silicon, Reflectivity, Fourier transforms, Interferometry, Reflectometry, Silicon films, Optics manufacturing

Proceedings Article | 21 August 2014 Paper
Proc. SPIE. 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Diffraction, Monochromatic aberrations, Distortion, Lens design, Objectives, Modulation transfer functions, Geometrical optics, Lithographic equipment, Optics manufacturing

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