Dr. Junbo Wang
at Insititute of Electrionics
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Silica, Electrodes, Metals, Crystals, Silicon, Finite element methods, Gyroscopes, Semiconducting wafers, Electromagnetism, Temperature metrology

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Resonators, Sensors, Electrodes, Silicon, 3D modeling, Optical simulations, Boron, Wet etching, Environmental sensing, Device simulation

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Microelectromechanical systems, Packaging, Signal to noise ratio, Resonators, Sensors, Electrodes, Silicon, Sensor performance, Finite element methods, Boron

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