Efficient and ultra-sensitive sensing of absolute angular position are critical technological requirements in various fields. Traditional angle measurement methods have disadvantages in terms of accuracy and device complexity, at the same time, the absolute angular position information cannot be obtained. Here, we report an laser angular position approach based on pixelated metasurfaces. By harnessing the interaction between a C-band Optical Frequency Comb (OFC) laser source and a plasmonic metasurface, we achieve precise angle encoding, enabling each individual meta-pixel within the pixelated metasurface to exhibit ultra-sensitive responses to angle variations. Experimental results demonstrate an angle resolution as low as µrad-level. Furthermore, by controlling the dimensions of meta-atom structures and designing specific combinations of meta-pixels, we manipulate the unique angular responses of individual pixels, effectively creating visualized unique scattering pattern. This technology efficiently captures angle information, and based on this, we demonstrate absolute angular position sensing.
The rapid measurement and demodulation of speed-range information to realize high-speed dynamic target simultaneously is of great significance to the development of industrial manufacturing and precision measurement technology. In the fields of aerospace, industrial automation and machine tool processing, rapid and precise measurement of dynamic target speed distance information is a key method to realize precision measurement, in-situ measurement and running state detection. Frequency Modulated Continuous Wave (FMCW) laser precision measurement technology has the characteristics of no cooperation, high precision, wide measuring range, strong anti-interference ability, etc. It is widely used in industrial measurement field. FMCW laser measurement system synchronously to achieve high speed target still has technical shortcomings. The proposed FMCW velocity-distance synchronous measurement method uses the optical frequency comb as a reference rule to intercept and operate signals at equal frequency intervals. It fits the FMCW laser measurement dynamic target frequency change curve to achieve the frequency parameter estimation of target measurement signals. The problem that FMCW laser measurement of dynamic target is slow and spectrum broadening is serious can’t accurately obtain target speed-distance information is solved. The experimental results show that the proposed method can obtain the speed in the simulation experiment with the target speed of 100m/s and the distance of 100m, and the maximum distance errors are 0.011m/s and 0.00117m respectively. The standard deviation of speed and distance measurement of this method is not higher than 0.090403m/s and 22.46μm in the online high-speed turntable measurement experiment with the speed of 11m/s.
In industrial sites, large-scale advanced manufacturing equipment such as optical diamond cutting lathes require stable operation during processing and are very sensitive to operating speed. However, the vibration generated by the environment or equipment will interfere with its operation and machining accuracy. A precise laser interference measurement system is required to monitor the running speed and position of the three-axis tool of the lathe in real time, providing accurate parameters for the closed-loop control system of the equipment, and improving the stability of lathe operation. Frequency-modulated continuous-wave (FMCW) lidar is widely used in the field of industrial measurement due to its non-contact, high accuracy, and fast dynamic response. The basic principle of FMCW lidars is to measure the velocity of a moving object through the Doppler frequency shift phenomenon. But the vibration generated by the moving object will cause the spectrum to broaden and the precision and repeatability of measurement to decrease. Therefore, we propose a large-bandwidth triangular wave-modulated lidar structure with Fabry-Pérot(F-P) cavity to achieve real-time high-precision measurement of the speed and distance of moving targets. This structure is based on the F–P resonance peaks generated by changing the length of the F-P cavity to accurately split the beat signal generated in the sweep frequency range of 1545-1565nm to obtain 40 sets of data with equal frequency intervals of 62GHz, effectively solve the problem of excessive data volume when measuring the continuous moving target speed and reduces the complexity of the algorithm. Splitting the measured beat signal based on the resonance peaks signal of the F-P cavity, which reduces the phase delay of the beat signal corresponding to the up- and down-scanning, thus reducing the signal spectrum broadening caused by frequency deviation and nonlinear, and increasing the target measurement resolution, accuracy and range. The experimental results show that for speeds of up to 250mm/s, the mean standard deviation was less than 152μm/s, the mean error was less than 183μm/s, the relative error of the mean value of speed measurement does not exceed 0.22%, and the standard deviation of the distance measurement results within a range of 4m under various speed conditions does not exceed 17μm, the error does not exceed 14μm, it has good accuracy and repeatability for the speed and distance measurement. The lidar architecture solution we proposed has important application value for large-scale industrial equipment measurement and operation monitoring.
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