Jung Hwan Kim
Material Science Engineer at Hanyang Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Sensors, Silicon, Semiconductor lasers, Pellicles, Extreme ultraviolet, Mask cleaning

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Safety, Silicon, Pellicles, Image quality, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing

Proceedings Article | 13 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Refractive index, Optical properties, Photons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Line edge roughness, Stochastic processes

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