Jung Hoon Oh
at Korea Kumho Petrochemical Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Etching, Polymers, Glasses, Diffusion, Photoresist materials, Polymerization, Extreme ultraviolet, Sodium, Line edge roughness

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top