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Jung-Yan Huang
at Industrial Technology Research Institute
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Publications (1)
Proceedings Article | 13 November 2002 Paper
Fabrication of microstructure using electrochemical etching in hydrofluoric acid
Jung-Yan Huang, Hung-Yin Tsai, Chih-Hung Wu, Chia-Ching Su, Chin-Hon Fan
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469434
KEYWORDS: Etching, Electrochemical etching, Surface roughness, Silicon, Plasma etching, Wet etching, Resistance, Micromachining, Semiconducting wafers, Microelectromechanical systems
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