Jung-Yan Huang
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Etching, Silicon, Resistance, Surface roughness, Wet etching, Micromachining, Plasma etching, Semiconducting wafers, Electrochemical etching

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