Dr. Junghun Chae
at Univ of Illinois
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 September 2008
Proc. SPIE. 7037, Carbon Nanotubes and Associated Devices
KEYWORDS: Carbon nanotubes, Photoresist materials, Excimer lasers, Optical lithography, Laser processing, Laser ablation, Microelectronics, Single walled carbon nanotubes, Plasma, Optoelectronic devices

Proceedings Article | 29 January 2008
Proc. SPIE. 6911, Emerging Liquid Crystal Technologies III
KEYWORDS: Optical lithography, Polymers, Excimer lasers, Microelectronics, Photoresist materials, Etching, Plasma display panels, Laser systems engineering, Amorphous silicon, Silicon

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