Dr. Jungmin Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper
Simon Mathijssen, Doogyu Lee, Jungmin Lee, Eunji Lee, Inbeom Yim, Jeongjin Lee, Seung Yoon Lee, Chan Hwang, Marc Noot, Arno van Leest, Yao Gao, Han-Gyeol Park, Seung-Bin Yang, Mi-Yeon Baek, Jong-Hyuk Yim, Thomas Kim, Ho-Hyuk Lee, Kemal Dahha, Stefan Smith-Meerman, Koen van Witteveen, Elliott McNamara, Matthew McLaren, Do-Haeng Lee
Proceedings Volume 12496, 124960H (2023) https://doi.org/10.1117/12.2658330
KEYWORDS: Semiconducting wafers, Overlay metrology, Metrology, Matrices, Polarization, Wafer testing, Signal processing, Independent component analysis, Education and training, Diffraction

Proceedings Article | 3 October 2022 Presentation + Paper
Proceedings Volume 12198, 121980B (2022) https://doi.org/10.1117/12.2635852
KEYWORDS: Nanoantennas, Nanoparticles, Particles, Continuous wave operation, Plasmonics, Transmittance, Metals, Femtosecond phenomena, Quantum dots, Optical filters

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 1205316 (2022) https://doi.org/10.1117/12.2627719
KEYWORDS: Overlay metrology, Diffraction gratings, Semiconducting wafers, Phase measurement, Phase shifts, Diffraction, Optical testing, Optical metrology, Optical design, Etching

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