Dr. Junguo Pang
at AIST
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Sensors, Calibration, Temperature metrology, Velocity measurements, Semiconducting wafers, Skin, Control systems, Wheatstone bridges, Amplifiers, Microelectromechanical systems

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