Dr. Junguo Pang Profile

Dr. Junguo Pang

at AIST

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Publications (1)

Proceedings Article | 28 February 2005 Paper

Fabrication and tests of a MEMS-based double-beam cantilever flow sensor with clarifying of temperature effect

Junguo Pang, Takehiko Segawa, Tsuyoshi Ikehara, Hiro Yoshida, Yoshihiro Kikushima, Hiroyuki Abe, Ryutaro Meada

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.582250

KEYWORDS: Sensors, Calibration, Temperature metrology, Velocity measurements, Semiconducting wafers, Skin, Control systems, Wheatstone bridges, Amplifiers, Microelectromechanical systems

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