Dr. Junha Lee Profile

Dr. Junha Lee

at SangMyung Univ

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Publications (1)

Proceedings Article | 28 May 2004 Paper

Suppression of sidelobe and overlap error in AttPSM metal layer lithography using rule-based OPC

Hoong Joo Lee, Mi-Young Lee, Jun-Ha Lee

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534484

KEYWORDS: Metals, Scattering, Optical proximity correction, Lithography, Chromium, Photomasks, Printing, Resolution enhancement technologies, Phase shifts, Data processing

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