Dr. Junha Lee
at SangMyung Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Scattering, Metals, Chromium, Printing, Data processing, Photomasks, Optical proximity correction, Resolution enhancement technologies, Phase shifts

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