Dr. Junichi Onodera
General Manager at Tokyo Ohka Kogyo Co Ltd
SPIE Involvement:
Conference Program Committee | Author
Publications (9)

PROCEEDINGS ARTICLE | March 30, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Electron beams, Etching, Polymers, Ultraviolet radiation, Silicon, Line edge roughness, Reactive ion etching, Fullerenes, Nanolithography

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Light sources, Spectroscopy, Molecules, Coating, Surface roughness, Atomic force microscopy, Extreme ultraviolet, Chemical analysis, Extreme ultraviolet lithography, Line edge roughness

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Image processing, Ultraviolet radiation, Silicon, Extreme ultraviolet, Line width roughness, Absorbance, Extreme ultraviolet lithography, Absorption, Chemically amplified resists

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Sensors, Polymers, Silicon, Hydrogen, Diffusion, Photoresist materials, Molecular interactions, Semiconducting wafers, Chemically amplified resists

PROCEEDINGS ARTICLE | March 26, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Electron beams, Etching, Polymers, Ultraviolet radiation, Silicon, Scanning electron microscopy, Line edge roughness, Photoresist processing, Fullerenes, Nanolithography

PROCEEDINGS ARTICLE | March 22, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Semiconductors, Lithography, Polymers, Molecules, Inspection, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Molybdenum, Chromatography

Showing 5 of 9 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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