Dr. Junko Konishi
at AGC Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Glasses, Polishing, Surface finishing, Ultrasonics, Extreme ultraviolet lithography, Birefringence, Line scan image sensors, Optical components, Polarization, Titanium dioxide

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5720, Micromachining Technology for Micro-Optics and Nano-Optics III
KEYWORDS: Scattering, Light scattering, Sol-gels, Heat treatments, Visible radiation, Backscatter, Particles, Laser scattering, Scanning electron microscopy, Titanium dioxide

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