Dr. Junko Konishi
at AGC Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Optical components, Polishing, Titanium dioxide, Polarization, Birefringence, Glasses, Ultrasonics, Extreme ultraviolet lithography, Surface finishing, Line scan image sensors

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5720, Micromachining Technology for Micro-Optics and Nano-Optics III
KEYWORDS: Visible radiation, Titanium dioxide, Backscatter, Scattering, Particles, Light scattering, Laser scattering, Heat treatments, Scanning electron microscopy, Sol-gels

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