Dr. Junmyung Lee
at Korea Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Etching, Argon, Chemical species, Dry etching, Polymers, Ions, Oxygen, Carbon monoxide, Autoregressive models, Plasma

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