Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Fluctuations and noise, Sensors, Control systems, Structural design, Chemical elements, Algorithm development, Spherical lenses, Environmental sensing, Thermal energy technology, Temperature metrology
In order to solve the problem of thermal drift and further improve the performance for sensors with extreme demand for precision, based on analysis of shortcomings of existing compensation methods and characteristics of thermal drift, a novel active suppression technology against thermal drift is proposed. Considering the change of properties of reference elements in sensors caused by temperature variation is the most major factor that introduces thermal drift error, a special thermal structure is designed to provide a small environmental chamber with sub-structure design of high performance heat isolation, heat conduction and homogenization of temperature, and the temperature in the environmental chamber is controlled with high precision based on bilateral temperature adjusting with thermo electronic cooler (TEC) devices, and a compound control algorithm of Bang-Bang and anti-windup PID. Experimental results with an ultra-precision spherical capacitive sensor show thermal drift error is significantly eliminated and the precision of the sensor can reach the level of several resolutions.
In order to solve the problem of noncontact, wireless and nonmagnetic displacement sensing with nanometer resolution within critical limited space for ultraprecision displacement monitoring in the Joule balance device, a novel wireless digital capacitive displacement sensor (WDCDS) is proposed. The WDCDS is fabricated with brass and other nonmagnetic material and powered with a small battery inside, a small integrated circuit is assembled inside for converting and processing of capacitive signal, and low power Bluetooth is used for wireless signal transmission and communication. Experimental results show that the WDCDS proposed has a resolution of better than 1nm and a nonlinearity of 0.077%, therefore it is a delicate design for ultraprecision noncontact displacement monitoring in the Joule balance device, meeting the demand for properties of wireless, nonmagnetic and miniaturized size.
In order to solve the problem of performance analysis and optimal design of flexible suspension structure for displacement measurement probing sensors, a novel theoretical model of stiffness with high accuracy is proposed. Both displacements constraint and angle constraint of elastic diaphragms are considered during modeling, and a stiffness equation including all dimensional parameters and material characteristics of elastic diaphragms is obtained. Thus the stiffness of the flexible suspension structure is modeled theoretically and accurately, and the influence on performance of probing sensors by each parameter can be analyzed. Simulations results show that the theoretical model of stiffness proposed is more accurate than existing models, and performance analysis and optimal design of probing sensors can be carried out based on it.
Based on the theoretical model of Airy spot, a method is proposed for improving the imaging speed from confocal microscopy. The virtual Airy spot is designed for obtaining the pattern on CCD at detecting plane. Here the size of the spot is determined by the parameters of imaging system and intensity data from point detector, which can receive data quicker than CCD. The treatment can improve the speed of imaging comparing with CCD at receiving end. The virtual structured detection is also utilized for generating high-resolution image. Some numerical simulation results are provided for demonstrating the validity of the proposed method.
When conventional physical pinholes are used, the alignment of pinholes is always a problem. An iterative Wiener
deconvolution filter is used to reject out-of-focus light, a sub-pixel centre location method is used to locate the centre of
the pinhole, and the dimensions of the pinhole are optimized using the confocal microscopic theory. A filter with digital
pinhole is thus developed and compared with filter with conventional physical pinhole through comparative tests.
Experimental results indicate that the alignment of pinholes can be made easy, a filter with digital pinhole can be used to
take place of a filter with conventional physical pinhole, and it can also reduce the pixel crosstalk resulting from multipoint