Jun Sung Chun
SPIE Involvement:
Publications (19)

Proceedings Article | 11 April 2016 Paper
Sungmin Park, Seongjun Jo, Yonghoon Lee, Chang Y. Ryu, Du Yeol Ryu, Jun Sung Chun
Proceedings Volume 9779, 977911 (2016) https://doi.org/10.1117/12.2221905
KEYWORDS: X-rays, Scattering, Reactive ion etching, Directed self assembly, Picosecond phenomena, Lithography, Silicon, Etching, Transmission electron microscopy, Annealing

Proceedings Article | 4 April 2016 Paper
Proceedings Volume 9776, 97760W (2016) https://doi.org/10.1117/12.2222065
KEYWORDS: Extreme ultraviolet, Photoresist materials, Extreme ultraviolet lithography, Etching, Neodymium, Optical lithography, Photoresist developing, Lithography, Semiconducting wafers, Scanners

SPIE Journal Paper | 14 March 2016
Dhairya Dixit, Avery Green, Erik Hosler, Vimal Kamineni, Moshe Preil, Nick Keller, Joseph Race, Jun Sung Chun, Michael O’Sullivan, Prasanna Khare, Warren Montgomery, Alain Diebold
JM3, Vol. 15, Issue 01, 014004, (March 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.1.014004
KEYWORDS: Directed self assembly, Critical dimension metrology, Scatterometry, Polymethylmethacrylate, Optical components, Picosecond phenomena, Optical simulations, Chemical elements, Optical lithography, Ellipsometry

Proceedings Article | 27 May 2015 Paper
Jing Jiang, Mufei Yu, Ben Zhang, Mark Neisser, Jun Sung Chun, Emmanuel Giannelis, Christopher Ober
Proceedings Volume 9422, 942222 (2015) https://doi.org/10.1117/12.2084896
KEYWORDS: Nanoparticles, Extreme ultraviolet lithography, Optical lithography, Oxides, Metals, Extreme ultraviolet, Zirconium dioxide, Photoresist materials, Deep ultraviolet, Particles

Proceedings Article | 27 May 2015 Paper
Christopher Ober, Jing Jiang, Ben Zhang, Li Li, Emmanuel Giannelis, Jun Sung Chun, Mark Neisser, Reyes Sierra-Alvares
Proceedings Volume 9422, 942207 (2015) https://doi.org/10.1117/12.2086488
KEYWORDS: Nanoparticles, Photoresist developing, Extreme ultraviolet lithography, Photoresist materials, Oxides, Optical lithography, Extreme ultraviolet, Metals, Line edge roughness, Zirconium dioxide

Showing 5 of 19 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top