Junwan Kim
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Microelectromechanical systems, Microfluidics, Sensors, Silicon, Control systems, Microfabrication, Reactive ion etching, Semiconducting wafers, Prototyping, Liquids

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Bolometers, Microbolometers, Infrared sensors, Mirrors, Fabry–Perot interferometers, Sensors, Black bodies, Infrared radiation, Temperature metrology, Absorption

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