Mr. Junwei Su
Research Assistant at Univ of Massachusetts Lowell
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Nanostructures, Polymethylmethacrylate, Chemical species, Ultraviolet radiation, Ions, Coating, Ion beams, Nanoimprint lithography, Ion beam lithography

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