Dr. Junwei Wei Profile

Dr. Junwei Wei

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Publications (2)

Proceedings Article | 13 March 2018 Paper

Assessment of local variability by high-throughput e-beam metrology for prediction of patterning defect probabilities

Fuming Wang , Stefan Hunsche, Roy Anunciado, Antonio Corradi , Hung Yu Tien, Peng Tang, Junwei Wei, Yongjun Wang, Wei Fang, Patrick Wong, Anton van Oosten, Koen van Ingen Schenau, Bram Slachter

Proceedings Volume 10585, 1058525 (2018) https://doi.org/10.1117/12.2297603

KEYWORDS: Semiconducting wafers, Stochastic processes, Scanning electron microscopy, Metrology, Electron beam lithography, Photomasks, Inspection, Critical dimension metrology, Optical proximity correction, Deep ultraviolet

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Proceedings Article | 2 April 2014 Paper

Investigation of a methodology for in-film defects detection on film coated blank wafers

Akiko Kiyotomi, Arnaud Dauendorffer, Satoru Shimura, Shinobu Miyazaki, Takemasa Miyagi, Shigeru Ota, Koji Haneda, Oksen Baris, Junwei Wei

Proceedings Volume 9050, 905024 (2014) https://doi.org/10.1117/12.2045737

KEYWORDS: Inspection, Scanning electron microscopy, Defect detection, Etching, Signal detection, Semiconducting wafers, Lithography, Optical inspection, Thin film coatings, Manufacturing

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