Dr. Jürgen Keller
Doctor at AMIC GmbH
SPIE Involvement:
Author
Publications (14)

PROCEEDINGS ARTICLE | April 30, 2007
Proc. SPIE. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007
KEYWORDS: Microelectromechanical systems, Nanotechnology, Mechanics, Reliability, Atomic force microscopy, Scanning electron microscopy, Ion beams, Digital image correlation, Scanning probe microscopy, Photomicroscopy

PROCEEDINGS ARTICLE | April 28, 2006
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Microelectromechanical systems, Semiconductors, Microsystems, Sensors, Ions, Silicon, Ion beams, Digital image correlation, Micromachining, Photomicroscopy

PROCEEDINGS ARTICLE | April 4, 2006
Proc. SPIE. 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
KEYWORDS: Microelectromechanical systems, Microsystems, Sensors, Ions, Silicon, Manufacturing, Ion beams, Digital image correlation, Micromachining, Photomicroscopy

PROCEEDINGS ARTICLE | April 4, 2006
Proc. SPIE. 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
KEYWORDS: Microelectromechanical systems, Polymers, Interfaces, Reliability, Atomic force microscopy, Finite element methods, Microelectronics, Digital image correlation, Scanning probe microscopy, Chemical elements

PROCEEDINGS ARTICLE | March 16, 2006
Proc. SPIE. 6179, Advanced Sensor Technologies for Nondestructive Evaluation and Structural Health Monitoring II
KEYWORDS: Microelectromechanical systems, Gas sensors, Sensors, Ions, Reliability, Atomic force microscopy, Scanning electron microscopy, Ion beams, Digital image correlation, Scanning probe microscopy

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Gas sensors, Sensors, Silicon, Reliability, Platinum, Atomic force microscopy, 3D metrology, Digital image correlation, Scanning probe microscopy, Temperature metrology

Showing 5 of 14 publications
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