Justin R. Freeman
Graduate Student Research Assistant at Purdue Univ
SPIE Involvement:
Author
Area of Expertise:
Laser-produced plasma (LPP) , Laser-induced breakdown spectroscopy (LIBS) , Extreme ultraviolet lithography (EUVL) source development
Profile Summary

Current PhD student at Purdue University conducting research in the areas of laser-produced plasma, extreme ultraviolet source development, and laser-induced breakdown spectroscopy.

Undergraduate degrees in Mechanical Engineering (B.S.) and German (B.A.) from the University of Rhode Island (2010).

Study abroad during the Winter Semester 2008-2009 at the Technical University Braunschweig (TUBS) in Braunschweig, Germany with research experience at the Institute of Machine Tools and Production Technology (IWF).

Previous work experience as a mechanical engineering intern at Supfina Machine Company in Quonsett, RI, USA and as an intern in the Paint Shop Central Controlling department for Volkswagen AG in Wolfsburg, Germany.

Publications (1)

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Lithography, Carbon dioxide, Ions, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

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